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Configure metal evaporation source and organic evaporation source, with flexible combination configuration. Depending on different configurations, functions such as single-layer evaporation, multi-source co evaporation, and layered coating can be achieved.
The seamless integration of evaporation coating and glove box environment enables seamless integration of evaporation, packaging, testing and other processes, resulting in higher stability. Widely used in research systems such as organic and inorganic perovskite solar cells, lithium batteries, and OLED thin films; Preparation of nano thin film optoelectronic devices and preliminary process testing of production lines.
1. Advanced technology, optimized design, high cost-effectiveness, stable performance, and low maintenance costs;
2. Widely used in the preparation of various film layers such as perovskite solar cells/OPV organic solar cells;
For example, the preparation of film layers such as perovskite layer, electron transport layer, and back electrode
Equipment model | ZHDS400 |
Coating method | Metal + organic evaporation |
Vacuum chamber structure | SUS304 square box, equipped with front and rear doors |
Vacuum chamber size | L400mmxW440mmxH450mm |
Heating temperature | room temperature-300℃ (optional) |
Substrate table size: drawer type | 120mmx120mm, rotatable, liftable, water-cooled |
Film thickness unevenness | ≤±5.0% (within 120mmx120mm range) |
Evaporation source | 2 groups of metal + 4 groups of organic or more, organic with temperature -controlled heating power supply, metal power supply (domestic or imported) |
Crystal oscillator film thickness monitor | domestic or imported (optional) |
Control method | PLC/PC control (optional) |
Footprint | L2500mmxW1600mmxH1900mm (excluding glove box) |
Total power | ≥ 10kW three-phase five-wire system |
