Name: Hot Wire CVD Diamond Film Deposition Machine H600
Brand: Beijing Technol Technology Co., Ltd.

Hot Wire CVD Diamond Film Deposition Machine H600

1. PLC+industrial computer can achieve manual, semi-automatic, and fully automatic control;

2. Equipped with an automatic constant pressure control and regulation system for process pressure;

3. Equipped with a water cut-off automatic alarm protection system to prevent damage to the growth substrate;

The door is a cylindrical double-layer water-cooled structure; Connected to the diffusion pump at the back (opposite to the door opening), according to the requirements of equipment electricity, gas, and water, the chassis needs to be water-cooled. The water-cooled electrode holes and electrodes must meet insulation, pass high current, support, water cooling, accuracy, and be connected to the power supply;

Advantages of Hot Wire CVD Diamond Film Deposition Machine H600

1. This machine is mainly used for developing conductive coating applications, such as BDD electrode anti-corrosion electrode, power battery electrode, etc;

2. It can be used to deposit thick diamond coatings, and the thickness on substrates with a diameter of 200 millimeters can reach millimeter level;

3. Can be used for depositing tool coatings, such as micro/nano diamond coatings, DLC, etc;

4. Can be used for depositing mold coatings, such as wire drawing molds, compression molds, etc;

Specifications of Hot Wire CVD Diamond Film Deposition Machine H600

Equipment name	Hot wire CVD diamond film deposition equipment
Equipment model	HF600
Vacuum chamber structure	vertical front door structure, rear exhaust system, double-layer water cooling
Vacuum chamber size	Φ600mmxH500mm
Vacuum system	high vacuum pump system
Substrate table size	Φ250mm²×300mm² square substrate stage (rotation, lifting optional)
Substrate temperature	600 ~ 1100℃
Power supply	dedicated hot wire power supply 800A, constant current or constant power mode
Gas path control	4-way gas flow control
Control mode	PC+PLC+ touch screen control
Footprint	host L1620mm×W1060mm×H1900mm
Total power	≥ 43kW

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