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The main application of hot wire CVD technology for growing diamonds is in the development of thick film (millimeter level) diamond coatings, micro - and nano diamond coatings, and other process technologies. It is typically used in diamond tool coatings, BDD electrodes, and other diamond coating applications. SUS304 stainless steel double-layer water cooling; Front door structure; The maximum angle of the furnace door in the open chamber is 135 degrees, with one observation window on the front and one on the side; Supporting load-bearing frame with spray coating treatment;
1. This machine is mainly used for developing large-area diamond coating applications, such as BDD electrode anti-corrosion electrode, power battery electrode, etc;
2. It can be used to deposit thick diamond coatings, and the thickness on substrates with a diameter of 200 millimeters can reach millimeter level;
3. Can be used for depositing tool coatings, such as micro/nano diamond coatings, DLC, etc;
4. Can be used for depositing mold coatings, such as wire drawing molds, compression molds, etc;
Equipment name | Hot wire CVD diamond film deposition equipment |
Equipment model | HF700 |
Vacuum chamber structure | vertical front door structure, rear exhaust system, double-layer water cooling |
Vacuum chamber size | Φ700mmxH700mm |
Vacuum system | high vacuum pump system |
Substrate table size | 350mm²×350mm² square substrate table (rotation, lifting optional) |
Substrate temperature | 600 ~ 1100℃ |
Power supply | dedicated hot wire power supply 1000A, constant current or constant power mode |
Gas path control | 4-way gas flow control |
Control mode | PLC+touch screen control |
Footprint | host L2200mm×W1200mm×H1800mm |
Total power | ≥ 64kW |
