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Adopting a multi chamber linear continuous coating form, each chamber is divided into an inlet/outlet chamber, a transition chamber, and an evaporation coating chamber according to its function. The middle of each chamber is connected by a gate valve, which can achieve pre vacuuming, transition equilibrium pressure, switching coating, transition equilibrium pressure, and sample discharge of the sample under vacuum environment.
1. A corrosion-resistant film layer can be formed on the surface of materials such as metals and ceramics, effectively preventing oxidation, corrosion, and wear of the materials and extending their service life;
2. Enhance hardness: By coating a layer of high hardness film on the surface of the material, the wear resistance of the material is improved and the service life is extended;
3. Improving optical performance: It can change the reflection, transmission, and absorption properties of materials for light, improve optical performance, such as increasing the reflection efficiency of mirrors;
4. Improving conductivity and thermal conductivity: In fields such as electronic devices and heat sinks, metal film layers can be coated on their surfaces using coating machines to enhance the conductivity and thermal conductivity of materials;
Coating method | evaporation |
Chamber structure | square box |
Process chamber size | L1900mmxH2200mmxW550mm |
Injection chamber | 500mm×600mm×400mm |
Transition chamber | 500mm×600mm×400mm |
Ultimate vacuum | 6×10-5pa |
Substrate table size | 300mm×400mm |
Substrate temperature | room temperature |
Uniformity | ≤±5.0% |
Sputtering target | low temperature and high temperature line source configuration |
Control | PC |
Spot area | 4000mm×2500mm×2200 |
Power | 70KW three-phase five-wire system |
